[1]王 伟,桓 茜,靳浩斌,等.三自由度平行臂式薄膜倾斜角溅射装置设计[J].工业仪表与自动化装置,2026,(01):26-31.[doi:10.19950/j.cnki.CN61-1121/TH.2026.01.005]
　WANG Wei,HUAN Xi,et al.Design of a 3-DOF parallel arm tilt angle sputtering device for the films[J].Industrial Instrumentation & Automation,2026,(01):26-31.[doi:10.19950/j.cnki.CN61-1121/TH.2026.01.005]
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三自由度平行臂式薄膜倾斜角溅射装置设计()

《工业仪表与自动化装置》[ISSN:1000-0682/CN:61-1121/TH]

卷:
期数:
2026年01期
页码:
26-31
栏目:
出版日期:
2026-02-15

文章信息/Info

Title:
Design of a 3-DOF parallel arm tilt angle sputtering device for the films
文章编号:
1000-0682（2026）01-0026-06
作者:
王 伟1; 2; 桓 茜1; 2; 靳浩斌1; 王婧楠1
1.陕西工业职业技术大学 航空工程学院；2.咸阳市太阳能光热转换材料重点实验室，陕西 咸阳 712000
Author(s):
WANG Wei 1;  2; HUAN Xi 1;  2; JIN Haobin 1; WANG Jingnan 2
1. School of Aeronautical Engineering, Shaanxi Polytechnic University, Xianyang 71200, China;2. Xianyang Key Laboratory of Solar Thermal Conversion Materials, Xianyang 71200, China
关键词:
磁控溅射; 三个自由度; 样品台; 协同联动
Keywords:
magnetron sputtering;  three degrees of freedom;  specimen holder;  collaborative linkage
分类号:
TB77, TN305, TH112
DOI:
10.19950/j.cnki.CN61-1121/TH.2026.01.005
文献标志码:
A
摘要:
常规上-下布局式系统中溅射平台存在倾斜角度调节范围小、公转、自转、摆动三自由度缺乏自动独立受控、多角度联动控制的问题。为了实现三个自由度的协同联动控制，设计了一种平行臂式三自由度协同驱动型薄膜倾斜角溅射平台。装置采用平行臂+中枢传动机构的设计布局，实现了实验台以中枢传动轴为原点的公转、自转、摇摆三个自由度的单个独立驱动、协同联动控制、连续角度变换控制目的，工件可以在0~90°范围的不同角度和方位上连续溅射，适合于单一/多个靶材的共溅射或者复杂工件的变角度/变方位溅射。装置创新设计了Y字型中枢传动机构，实现了平行臂的摇摆和实验台的自转的混联传动目的，此外设计了0~700 ℃的工件加热能力，利用电磁制动器进行装置制动与紧急停止。整体结构设计的自动化程度高、控制精度高、结构可靠性高，广泛应用于新型显示、半导体、信息存储、模具镀膜等领域
Abstract:
In the conventional top-down layout systems, the sputtering platform has the problems of small tilt angle adjustment range and lack of automatic independent control and multi-angle linkage control of the three degrees of freedom (3-DOF) of revolution, rotation and swing. To realize the coupling control of three degrees of freedom, a 3-DOF parallel arm collaborative driving film tilt angle sputtering platform was designed. The design layout of parallel arm and central transmission mechanism was adopted to realize the purpose of single independent driving, collaborative linkage control, and continuous angle transformation control of the three degrees of freedom of revolution, rotation, and swing of the test platform with the pivot transmission axis. The workpiece can be sputtered continuously at different angles and directions in the range of 0~90°, which was suitable for co-sputtering of single/multiple targets or variable angle/azimuth sputtering of complex accessories. The Y-shaped central transmission mechanism was innovatively designed to realize the hybrid transmission of the swing of the parallel arm and the rotation of the test bench. In addition, the heating capacity of the workpiece at 0~700 °C was designed, and the electromagnetic brake was used for device braking and emergency stop. The overall structure design has a high degree of automation, high control accuracy, and high structural reliability, and is widely used in fields such as new displays, semiconductors, information storage, and mold coating.

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备注/Memo

备注/Memo:
收稿日期：2025-08-12基金项目：国家自然科学基金（52401098）；陕西省自然科学基础研究计划资助项目（2024JC-YBMS-271）；咸阳市渭城区科技发展计划项目（2024VCZY-005）；陕西工业职业技术大学科研基金资助项目（2025YKZD-004）第一作者：王伟（1990—），男，博士研究生，主要研究方向为薄膜功能化调控及应用。E-mail: wangwei05@sxpi.edu.cn通信作者：王伟（1990—），男，博士研究生，副教授，主要研究方向为薄膜功能化调控及应用。E-mail: wangwei05@sxpi.edu.cn
更新日期/Last Update: 1900-01-01