[1]张睿平,张吉月,左海涛,等.提拉法生长晶体的超低速控制技术研究[J].工业仪表与自动化装置,2018,(06):43-47.[doi:1000-0682（2018）06-0000-00]
　ZHANG Ruiping,ZHANG Jiyue,ZUO Haitao,et al.Research on ultra-low speed control technology of laser crystal pulling device[J].Industrial Instrumentation & Automation,2018,(06):43-47.[doi:1000-0682（2018）06-0000-00]

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提拉法生长晶体的超低速控制技术研究

《工业仪表与自动化装置》[ISSN:1000-0682/CN:61-1121/TH]

卷:

期数:

2018年06期

页码:

43-47

栏目:

出版日期:

2018-12-15

文章信息/Info

Title:

Research on ultra-low speed control technology of laser crystal pulling device

作者:

张睿平1; 张吉月2; 左海涛2; 李建鸿1

1.北京化工大学，北京 100029；

2.北京石油化工学院，北京 102617

Author(s):

ZHANG Ruiping1;  ZHANG Jiyue2;  ZUO Haitao2;  LI Jianhong1

1. Beijing University of Chemical Technology, Beijing 100029, China;

2. Beijing Institute of Petrochemical Technology, Beijing 102617, China

关键词:

伺服电机; 建模控制; 超低速控制; 增益列表

Keywords:

servo motor;  modeling control;  ultra low speed control;  gain list

分类号:

TP273

DOI:

1000-0682（2018）06-0000-00

文献标志码:

A

摘要:

激光晶体提拉装置长期工作在超低速模式下，伺服系统受非线性摩擦干扰等因素在低速范围内出现速度爬行和抖动现象。在两相转子坐标系下对伺服系统进行矢量分析，建立了伺服系统的机理模型，提出变增益的列表控制方法。仿真和实测表明，这种增益列表的控制方式可以较好地消除伺服电机在整个低速段的爬行和抖动。

Abstract:

The long term work of the laser crystal pulling device is in the ultra-low speed mode, and the servo system is subjected to the nonlinear frictional interference and other factors to creep and shake in the low speed range. Based on the vector analysis of the servo system in the two-phase rotor coordinate system, the mechanism model of the servo system is established, and the list control method of the variable gain is proposed. he simulation and measurement show that the control mode of this gain list can eliminate the crawling and jitter of the servo motor in the whole low-speed segment.

参考文献/References:

[1] 纪文刚,林立,代峰燕.基于Modbus-TCP的晶体生长控制技术的研究[J].工业仪表与自动化置,2008(05):3-5.

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备注/Memo

备注/Memo:

收稿日期：2018-04-16

作者简介：张睿平(1993)，男，硕士研究生，研究方向为过程控制，运动控制。

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