[1]李建鸿,纪文刚,左海涛,等.基于提拉法生长激光晶体的高精度称重系统设计[J].工业仪表与自动化装置,2019,(01):46-50.[doi:1000-0682（2019）01-0000-05]
　LI Jianhong,JI Wengang,ZUO Haitao,et al.Design of high-precision weighing system based on czochralski laser crystal growth[J].Industrial Instrumentation & Automation,2019,(01):46-50.[doi:1000-0682（2019）01-0000-05]
点击复制

基于提拉法生长激光晶体的高精度称重系统设计

《工业仪表与自动化装置》[ISSN:1000-0682/CN:61-1121/TH]

Title:: Design of high-precision weighing system based on czochralski laser crystal growth

作者:: 李建鸿1; 2; 纪文刚1; 左海涛1; 张睿平1; 2; 金健1; 1.北京石油化工学院，北京 102617；
2.北京化工大学，北京 100029

Author(s):: LI Jianhong1; 2; JI Wengang1; ZUO Haitao1; ZHANG Ruiping1; 2; JIN Jian1; 1.Beijing Institute of Petrochemical Technology，Beijing 102617，China；2.Beijing University of Chemical Technology，Beijing 100029，China

摘要:: 针对机械振动、电机转动、温度变化以及激光晶体生长固熔界面张力波动等干扰因素而导致激光晶体重量测量不准确的问题，采用具备三阶温度系数和非线性数字补偿功能的前端信号处理电路、基于双路冒泡排序的中位值均值数据滤波算法，设计了用于激光晶体生长的高精度称重系统。实验表明，系统能够较好实现晶体重量的测量，测量范围0~5 kg，分辨率0.01 g，通过友好的人机界面实现称重系统的初始化、生长过程数据的查询与记录，体现了虚拟仪器的核心思想，系统成功应用于激光晶体实际生长，等径生长阶段控制均匀，具有良好的稳定性与精确性。

Abstract:: In order to solve the problem of inaccurate measurement of the weight of the laser crystal due to disturbance factors such as mechanical vibration, motor rotation, temperature change, and the tension fluctuations of laser crystal growth solid solution interface and so on,a set of high-precision weighing system for laser crystal growth is designed,which use a front-end signal processing circuit with a third-order temperature coefficient and a non-linear digital compensation function and filtering algorithm of median data based on two-way bubble sort.Experiment results show that the system can achieve a good measurement of crystal weight and has a measuring range of 0~5kg and a resolution of 0.01g.The initialization of the weighing system and the query and recording of growth process data can be achieved through a friendly human-machine interface that embodies the core idea of virtual instruments.The system has been successfully applied to the actual growth of laser crystals with uniform control in the equal diameter growth stage that reflect good stability and accuracy.

[1] 肖学峰,杜懋陆.人工晶体材料的研究进展[J].科技创新导报，2009(08):6-7.

[2] 纪文刚,代峰燕.基于模型的晶体生长控制技术的研究[J].北京石油化工学院学报，2008,16(1):6-9.

[3] 刘凤凯.蓝宝石晶体生长设备称重系统设计与研究[D].西安:西安理工大学，2014.

[4] 耀飞黔,李艳杰.晶体生长控制中的高分辨力称重系统[J].传感器技术，2003,22(1):53-55.

[5] 景忠杰,李欣,董静薇.用于晶体生长过程监控的高精确度称重系统设计[J].哈尔滨理工大学学报，2007(02): 114-120.

[6] 李娜,黄孝彬,田志强,等.生产过程数据稳定性判断的一种方法[J].华电技术，2010,32(1):31-34.

更新日期/Last Update: 2019-01-15